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Kramatron Precision Inc. is a qualified supplier of sputtering target, backing plate and cooling plate machining in the semiconductor field of thin film applications. Industry leaders look to Kramatron for machining their forged alloy materials with special grain structure to exact geometrical specifications and finishes. We supply popular geometries such as planar, circular, rectangular, ring, conical, as well as custom configurations. Kramatron machines many shapes and sizes in evaporation materials for particular E-guns including starter source and slugs.
PVD Sputtering Target Machining
We have vast experience in machining customer supplied sputtering target materials with specific grain structure including aluminum alloys Al/Cu.5, Al/Si1, Al/Si1/Cu.5, Pure Al 99.9999%, Al/Cu2, copper, nickel, titanium, and more. These Physical Vapor Deposition (PVD) sputtering targets are used for thin film deposition applications in the data storage, ink jet, and semiconductor industries. Our methodology takes into consideration the various aspects of material grain structure and maintain its integrity for optimal performance. We have reduced "burn in" times for end users with our proprietary surface finish machining processes and tooling. Kramatron has the technology to produce a 16rms or better finish on sputtering surfaces, vacuum grooves, and water jacket sealing surfaces in all types of configurations. We can machine up to 16.600" diameter sputtering targets with quick delivery and unsurpassed quality.Kramatron has been involved in machining components for major corporations including: IBM, Motorola, Philips, Sony, Tokoyo Electron, and Texas Instrument.
Backing & Cooling Plate Machining
Kramatron Precision Inc. supplies precision machined backing plates for bonding special alloy materials. We supply backing plates in various configurations and in many materials including OFHC Copper 101 (for high thermal and electrical conductivity), 6061-T6 aluminum, stainless steel, and titanium to your specifications. Sealing and bonding surfaces with critical flatness specs are no problem. All Kramatron furnished material comes with certification. We also machine custom designed cooling plates and planar magnetron components.
Identification
All materials, customer or Kramatron supplied, are given specialized serial numbers so they can be identified and tracked from incoming, during manufacturing, and through end use in the field. Machined sputtering targets are scribed or electro-etched with a unique I.D. number, manufacturing date and documented as per customer specifications. Our Standard Operating Procedures include "TFO" (Traceable From Origin) identification.
Vacuum Equipment Components
Kramatron Precision is a qualified supplier of vacuum equipment components to leading OEM's worldwide. Confidentiality agreements with all of our customers ensure all technical and procurement specifications are not disclosed.
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